Target for ultraviolet light generation, electron beam-excited ultraviolet light source, and production method for target for ultraviolet light generation
A target for ultraviolet light generation comprises a substrate adapted to transmit ultraviolet light therethrough and a light-emitting layer disposed on the substrate and generating ultraviolet light in response to an electron beam. The light-emitting layer includes a polycrystalline film constitut...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
19.01.2016
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Subjects | |
Online Access | Get full text |
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