Isotropically-etched cavities for evanescent-mode electromagnetic-wave cavity resonators

• Main Authors: PARK SANG-JUNE, SHENOY RAVINDRA V, STEPHANOU PHILIP JASON
• Format: Patent
• Language: English
• Published: 03.11.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRICITY; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE; WAVEGUIDES

This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the resonator includes an isotropically-etched cavity operable to support one or more evanescent electromagnetic wave modes. In some implementations, the resonator also includes a cavity ceiling arranged to form a volume in conjunction with the isotropically-etched cavity. In some implementations, the resonator also includes a capacitive tuning structure having a portion that is located at least partially within the volume so as to support the evanescent electromagnetic wave modes. In some implementations, a distal surface of the tuning structure is separated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially on the gap distance.