Fabrication of micro lenses

A method for fabricating a micro lens array is provided. The method includes forming a first lens material structure on a substrate. The first lens material structure includes a plurality of elevated portions. The elevated portions are separated by recesses. Moreover, the plurality of elevated porti...

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Bibliographic Details
Main Author ENGELHARDT MANFRED
Format Patent
LanguageEnglish
Published 12.05.2015
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE
TRANSPORTING
WORKING OF PLASTICS
WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Summary:A method for fabricating a micro lens array is provided. The method includes forming a first lens material structure on a substrate. The first lens material structure includes a plurality of elevated portions. The elevated portions are separated by recesses. Moreover, the plurality of elevated portions have an average height of at least 3 micrometers. Furthermore, the method for fabricating a micro lens array includes depositing a dielectric material on the first lens material structure and the recesses to form a second lens material structure. The second lens material structure has an average thickness of at least 1 micrometer. Moreover, the first and second lens material structures form together the micro lens array.
Bibliography:Application Number: US201113235707