Carrier and adhesion amount measuring apparatus, and measuring method, program, and recording medium of the same

A carrier includes attachment holes to which a catalyst attaches, and non-attachment holes to which the catalyst does not attach. An attachment quantity measurement device includes an electromagnetic wave output device that outputs a terahertz wave toward the carrier, an electromagnetic wave detecto...

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Bibliographic Details
Main Authors NISHINA SHIGEKI, IMAMURA MOTOKI
Format Patent
LanguageEnglish
Published 03.03.2015
Subjects
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