Pattern forming method
According to one embodiment, a pattern forming method includes forming a physical guide that includes a first predetermined pattern in a first region on a lower layer film, and includes a second predetermined pattern and a dummy pattern in a second region on the lower layer film, forming a block pol...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
30.12.2014
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Subjects | |
Online Access | Get full text |
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