Charged particle beam device

• Main Authors: FUKUDA MUNEYUKI, SOHDA YASUNARI, YAMANASHI HIROMASA
• Format: Patent
• Language: English
• Published: 01.07.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The astigmatism control processing time is decreased to 1 second or less by improving the astigmatic difference measurement accuracy. A charged particle beam device includes: a stage on which a sample is loaded; a transport mechanism which carries the sample onto the stage; a charged particle beam o...