Multilayer low reflectivity hard mask and process therefor
A method utilizing a multilayer anti-reflective coating layer structure can achieve low reflectivity at high numerical apertures. The multilayer anti-reflective coating structure can be utilized as a hard mask forming various integrated circuit structures. A multilayer anti-reflective coating struct...
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | English |
Published |
13.11.2012
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!