Wafer center finding with charge-coupled devices
A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substanti...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
28.08.2012
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Subjects | |
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Abstract | A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances. |
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AbstractList | A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances. |
Author | BUZAN FORREST T KILEY CHRISTOPHER C VAN DER MEULEN PETER FOGEL PAUL E |
Author_xml | – fullname: KILEY CHRISTOPHER C – fullname: FOGEL PAUL E – fullname: VAN DER MEULEN PETER – fullname: BUZAN FORREST T |
BookMark | eNrjYmDJy89L5WQwCE9MSy1SSE7NKwFSaZl5KZl56QrlmSUZCskZiUXpqbrJ-aUFOakpCimpZZnJqcU8DKxpiTnFqbxQmptBwc01xNlDN7UgPz61uCARaFRqSXxosIWRqbGliYWTkTERSgD48izM |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
ExternalDocumentID | US8253948B2 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_US8253948B23 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 16:51:45 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_US8253948B23 |
Notes | Application Number: US201213406252 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20120828&DB=EPODOC&CC=US&NR=8253948B2 |
ParticipantIDs | epo_espacenet_US8253948B2 |
PublicationCentury | 2000 |
PublicationDate | 20120828 |
PublicationDateYYYYMMDD | 2012-08-28 |
PublicationDate_xml | – month: 08 year: 2012 text: 20120828 day: 28 |
PublicationDecade | 2010 |
PublicationYear | 2012 |
RelatedCompanies | BROOKS AUTOMATION, INC BUZAN FORREST T KILEY CHRISTOPHER C VAN DER MEULEN PETER FOGEL PAUL E |
RelatedCompanies_xml | – name: FOGEL PAUL E – name: BROOKS AUTOMATION, INC – name: KILEY CHRISTOPHER C – name: BUZAN FORREST T – name: VAN DER MEULEN PETER |
Score | 2.8656673 |
Snippet | A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HANDLING THIN OR FILAMENTARY MATERIAL MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TESTING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING |
Title | Wafer center finding with charge-coupled devices |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20120828&DB=EPODOC&locale=&CC=US&NR=8253948B2 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1La8MwDBale962bGPdixxGbmHNo5lzCIO8KIM-WJuttxLHTimMJDQp-_uTTdrtsp0MNghb8MmWLH0CeDQIswTvlI4gRAfFsblOMt7XKREt4ByXUCJqh0djZ5jYr4vBogPrXS2M5An9kuSIiKgM8d5Ie139BLFCmVtZP9E1TpUv8dwLtdY7NkzByKaFvhdNJ-Ek0ILAS2ba-M1DR8hybeKjtT4Qr2hBsx-9-6Iopfp9o8RncDhFYUVzDh1eKHAS7BqvKXA8av-7FTiSCZpZjZMtCOsL6H-kOd-oIq0SB_npXKxUEVBVJe8R17NyW31ypjIu7cAlqHE0D4Y6bmK5P_Ayme23a11BtygLfg0qcXnOnm3GaE5sVGJqktRlhkHNjGUDkvag96eYm3_WbuFUaE4ESk1yB91ms-X3eNM29EHq6Bup1IKd |
link.rule.ids | 230,309,786,891,25594,76904 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8NADA9jfsw3nYrzsw_St-L6se76UIR-UXXthtt0b6PtXWUgXVk7_PfNHdv0RZ8OchBygSQkl_wCcK8SqnPcKQWNEBMU02AKyVhXSQlfAWdaJCV8djiKzXBqPM96swYstrMwAif0S4AjokVlaO-18NflTxHLE72V1UO6QNLyMZjYnrzJjlWNI7LJnmP7o6E3dGXXtadjOX61MRHSLYM46K33-pgRcph9_83hQynl74gSHMP-CJkV9Qk0WNGGlrtdvNaGw2jz392GA9GgmVVI3BhhdQrd9yRnK4m3VeIhPp2LD4kXVCWBe8SUbLkuPxmVKBN-4AykwJ-4oYJCzHcPnk_HO3H1c2gWy4JdgEQsltO-QWmaEwOVmGgksaiqplpGsx5JOtD5k83lP3d30Aon0WA-eIpfruCIa5EXTTVyDc16tWY3GHXr9Fbo6xvrSYWI |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Wafer+center+finding+with+charge-coupled+devices&rft.inventor=KILEY+CHRISTOPHER+C&rft.inventor=FOGEL+PAUL+E&rft.inventor=VAN+DER+MEULEN+PETER&rft.inventor=BUZAN+FORREST+T&rft.date=2012-08-28&rft.externalDBID=B2&rft.externalDocID=US8253948B2 |