Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using thin film deposition apparatus

A thin film deposition apparatus to remove static electricity generated between a substrate and a mask, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus.

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Bibliographic Details
Main Authors JI CHANG-SOON, AN CHENGGUO, KIM TAE-SEUNG, LEE JONG-WOO
Format Patent
LanguageEnglish
Published 08.05.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A thin film deposition apparatus to remove static electricity generated between a substrate and a mask, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus.
Bibliography:Application Number: US20100962910