Multi-stable micro electromechanical switches and methods of fabricating same

• Main Authors: DANZL RALPH B, MATTES MICHAEL F, HABETS PHILIPPE, RECEVEUR ROGIER, HOUBEN RICHARD P. M
• Format: Patent
• Language: English
• Published: 07.02.2012
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SWITCHES; ELECTRICITY; EMERGENCY PROTECTIVE DEVICES; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; RELAYS; SELECTORS; TRANSPORTING

A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch including a moveable member configured to electrically cooperate with a receiving terminal is formed on a substrate. The moveable member and the receiving terminal each include an insulating layer proximate to the substrate and a conducting layer proximate to the insulating layer opposite the substrate. In various embodiments, the conducting layers of the moveable member and/or receiving terminal include a protruding region that extends outward from the substrate to switchably couple the conducting layers of the moveable member and the receiving terminal to thereby form a switch. The switch may be actuated using, for example, electrostatic energy.