Method and apparatus for treating gas containing flourine-containing compounds
To provide a method and apparatus for treating a waste gas containing fluorine-containing compounds, according to which PFCs can be decomposed efficiently even at low temperature, and moreover fluorine from the product of the decomposition can be recovered for reuse efficiently. An embodiment of the...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
07.06.2011
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Subjects | |
Online Access | Get full text |
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