Gettering members, methods of forming the same, and methods of performing immersion lithography using the same
Provided herein are gettering members that include a monitor substrate and a conditioning layer thereon. Also provided herein are methods of forming gettering layers and methods of performing immersion lithography processes using the same.
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | English |
Published |
26.04.2011
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Provided herein are gettering members that include a monitor substrate and a conditioning layer thereon. Also provided herein are methods of forming gettering layers and methods of performing immersion lithography processes using the same. |
---|---|
Bibliography: | Application Number: US20070983993 |