Lithographic apparatus, and motor cooling device

A lithographic device includes a cooling device for removing heat from a motor. The cooling device has a cooling element provided in thermal contact with at least part of the motor. The cooling device further has a cooling duct assembly with a supply duct to supply a cooling fluid to the cooling ele...

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Bibliographic Details
Main Author AUER FRANK
Format Patent
LanguageEnglish
Published 29.03.2011
Subjects
ACCESSORIES THEREFOR
APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES
APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM
CINEMATOGRAPHY
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DYNAMO-ELECTRIC MACHINES
ELECTRICITY
ELECTROGRAPHY
GENERATION
HOLOGRAPHY
PHOTOGRAPHY
PHYSICS
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Abstract A lithographic device includes a cooling device for removing heat from a motor. The cooling device has a cooling element provided in thermal contact with at least part of the motor. The cooling device further has a cooling duct assembly with a supply duct to supply a cooling fluid to the cooling element, and a discharge duct to discharge the cooling fluid from the cooling element. A pump causes the cooling fluid to flow through at least part of the cooling duct assembly. A flow control device controls a flow rate of the cooling fluid through at least part of the cooling duct assembly, to maintain a predetermined average temperature of the cooling fluid in the cooling element.
AbstractList A lithographic device includes a cooling device for removing heat from a motor. The cooling device has a cooling element provided in thermal contact with at least part of the motor. The cooling device further has a cooling duct assembly with a supply duct to supply a cooling fluid to the cooling element, and a discharge duct to discharge the cooling fluid from the cooling element. A pump causes the cooling fluid to flow through at least part of the cooling duct assembly. A flow control device controls a flow rate of the cooling fluid through at least part of the cooling duct assembly, to maintain a predetermined average temperature of the cooling fluid in the cooling element.
Author AUER FRANK
Author_xml – fullname: AUER FRANK
BookMark eNrjYmDJy89L5WQw8MksychPL0osyMhMVkgsKEgsSiwpLdZRSMxLUcjNL8kvUkjOz8_JzEtXSEkty0xO5WFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8aHB5paGZkZm5k5GxkQoAQAP0yzt
ContentType Patent
DBID EVB
DatabaseName esp@cenet
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
Physics
ExternalDocumentID US7916267B2
GroupedDBID EVB
ID FETCH-epo_espacenet_US7916267B23
IEDL.DBID EVB
IngestDate Fri Jul 19 15:11:05 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_US7916267B23
Notes Application Number: US20060511532
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110329&DB=EPODOC&CC=US&NR=7916267B2
ParticipantIDs epo_espacenet_US7916267B2
PublicationCentury 2000
PublicationDate 20110329
PublicationDateYYYYMMDD 2011-03-29
PublicationDate_xml – month: 03
  year: 2011
  text: 20110329
  day: 29
PublicationDecade 2010
PublicationYear 2011
RelatedCompanies ASML NETHERLANDS B.V
RelatedCompanies_xml – name: ASML NETHERLANDS B.V
Score 2.8025591
Snippet A lithographic device includes a cooling device for removing heat from a motor. The cooling device has a cooling element provided in thermal contact with at...
SourceID epo
SourceType Open Access Repository
SubjectTerms ACCESSORIES THEREFOR
APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES
APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM
CINEMATOGRAPHY
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DYNAMO-ELECTRIC MACHINES
ELECTRICITY
ELECTROGRAPHY
GENERATION
HOLOGRAPHY
PHOTOGRAPHY
PHYSICS
Title Lithographic apparatus, and motor cooling device
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110329&DB=EPODOC&locale=&CC=US&NR=7916267B2
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT8MwDLam8bzBADFeygHtREW3vrZDhdR21YTYQ2xFu01Jk4xe2mrtxN_HzR5wgasjWUmkz3Yc-zPAo4oBOj1Lsy0pNNOIDa2nS1trm5Q6QuhSKvri4cgeRObr3JrXINn1wiie0C9FjoiIihHvpbLX-U8SK1C1lcUzS1CUvYQzN2jxXbpPN_ABHXhufzIOxn7L991o2hq9uw6GQR3b8dBaH2AU7VRg6H94VVNK_tujhGdwOEFlaXkONZE24MTfDV5rwPFw-9_dgCNVoBkXKNyCsLgA_S0pPzdM00lMaK7Yu9fFE6EpJ3jz2YrEWTWLZ0m4qAzBJZCwP_MHGm5isT_wIprut2tcQT3NUnENxOQGlTZjklNqtlmX6txhtGvzuE07CNwmNP9Uc_PP2i2cbhKl1VC3O6iXq7W4R09bsgd1R9-yNYNB
link.rule.ids 230,309,783,888,25576,76876
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT8MwDLam8Rg3GCDGMwe0ExV9rd0OFdLaTQX2EtvQblXaJNBLO62d-Pu42Tq4wNWRrCTSZzuO_RngXsYAeqelWC3BFdOIDKWjCkvRTEptzlUhJH3xcGT5c_Nl0VpUIC57YSRP6JckR0RERYj3XNrr5U8Sy5O1ldljGKMoferPHK_JynSfauAD2us6vcnYG7tN13Xm0-bozbExDNItu4vWeg8jbLsAQ--9WzSlLH97lP4x7E9QWZKfQIUndai55eC1OhwOt__ddTiQBZpRhsItCLNTUAdx_rlhmo4jQpeSvXudPRCaMII3n65IlBazeD4I44UhOAPS781cX8FNBLsDB_PpbrvGOVSTNOEXQExmUGGFoWCUmlrYpiqzQ9q2WKRRHYHbgMafai7_WbuDmj8bDoLB8-j1Co42SdNiwNs1VPPVmt-g183DW3lf3wVkhjQ
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Lithographic+apparatus%2C+and+motor+cooling+device&rft.inventor=AUER+FRANK&rft.date=2011-03-29&rft.externalDBID=B2&rft.externalDocID=US7916267B2