Integrating high-voltage CMOS devices with low-voltage CMOS

• Main Authors: ENCISO EDWARD, WANG S. JONATHAN, CHEN JOHN, BENGALI SADIQ, COONEY TOM, WEAVER JAMES
• Format: Patent
• Language: English
• Published: 24.08.2010
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

High-voltage CMOS devices and low-voltage CMOS devices are integrated on a common substrate by forming a sacrificial film over at least active device areas, lithographically defining device active regions of the high-voltage CMOS devices, implanting dopants selectively through the sacrificial film i...