Methods and systems for identifying defect types on a wafer

• Main Authors: SHEN WEI-NING, SAITO JASON
• Format: Patent
• Language: English
• Published: 01.06.2010
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Various methods and systems for identifying defect types on a wafer are provided. One computer-implemented method for identifying defect types on a wafer includes acquiring output of an inspection system for defects detected on a wafer. The output is acquired by different combinations of illuminatio...