Dual technology optical profilometer
The device comprises a light source (LED), beam splitters, illumination pattern generating mechanism and interchangeable microscope lenses that are lenses that may be used to obtain confocal images and lenses that may be used to obtain interferometric images. The generating mechanism can generate a...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
22.12.2009
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Subjects | |
Online Access | Get full text |
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