Method of manufacturing micromirror array and method of manufacturing optical device having micromirror

A method of manufacturing a micromirror array and a method of manufacturing an optical device having a micromirror. The method of manufacturing a micromirror array includes forming an adhesion layer on a substrate and a magnetic layer on the adhesion layer, patterning the adhesion layer and magnetic...

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Main Authors NAM YUN-WOO, LEE HOO-SAN
Format Patent
LanguageEnglish
Published 13.05.2008
Subjects
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Abstract A method of manufacturing a micromirror array and a method of manufacturing an optical device having a micromirror. The method of manufacturing a micromirror array includes forming an adhesion layer on a substrate and a magnetic layer on the adhesion layer, patterning the adhesion layer and magnetic layer, magnetizing the magnetic layer and forming a bonding layer on each side of the adhesion layer and the magnetic layer. The substrate is severed into units, each unit including the adhesion layer, the magnetic layer, and the bonding layer. A mirror surface is formed on a side of the substrate to form a unit micromirror structure. The unit micromirror structure is then placed in a holder to form a micromirror array.
AbstractList A method of manufacturing a micromirror array and a method of manufacturing an optical device having a micromirror. The method of manufacturing a micromirror array includes forming an adhesion layer on a substrate and a magnetic layer on the adhesion layer, patterning the adhesion layer and magnetic layer, magnetizing the magnetic layer and forming a bonding layer on each side of the adhesion layer and the magnetic layer. The substrate is severed into units, each unit including the adhesion layer, the magnetic layer, and the bonding layer. A mirror surface is formed on a side of the substrate to form a unit micromirror structure. The unit micromirror structure is then placed in a holder to form a micromirror array.
Author NAM YUN-WOO
LEE HOO-SAN
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Snippet A method of manufacturing a micromirror array and a method of manufacturing an optical device having a micromirror. The method of manufacturing a micromirror...
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SubjectTerms INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
Title Method of manufacturing micromirror array and method of manufacturing optical device having micromirror
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