Trench isolation structure for a semiconductor device with reduced sidewall stress and a method of manufacturing the same

By forming a non-oxidizable liner in isolation trenches, the creation of compressive stress may be significantly reduced, wherein, in illustrative embodiments, silicon nitride may be used as liner material. For this purpose, the etch behavior of the silicon nitride may be efficiently modified on the...

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Main Authors KRUEGEL STEPHAN, PRUEFER EKKEHARD, HEMPEL KLAUS
Format Patent
LanguageEnglish
Published 15.04.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Abstract By forming a non-oxidizable liner in isolation trenches, the creation of compressive stress may be significantly reduced, wherein, in illustrative embodiments, silicon nitride may be used as liner material. For this purpose, the etch behavior of the silicon nitride may be efficiently modified on the basis of an appropriate surface treatment, thereby providing a high degree of material integrity during a subsequent etch process for removing non-modified portions of silicon nitride, which may also be used as an efficient CMP stop layer.
AbstractList By forming a non-oxidizable liner in isolation trenches, the creation of compressive stress may be significantly reduced, wherein, in illustrative embodiments, silicon nitride may be used as liner material. For this purpose, the etch behavior of the silicon nitride may be efficiently modified on the basis of an appropriate surface treatment, thereby providing a high degree of material integrity during a subsequent etch process for removing non-modified portions of silicon nitride, which may also be used as an efficient CMP stop layer.
Author PRUEFER EKKEHARD
KRUEGEL STEPHAN
HEMPEL KLAUS
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Snippet By forming a non-oxidizable liner in isolation trenches, the creation of compressive stress may be significantly reduced, wherein, in illustrative embodiments,...
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SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title Trench isolation structure for a semiconductor device with reduced sidewall stress and a method of manufacturing the same
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