Adjustable self-aligned air gap dielectric for low capacitance wiring

• Main Authors: GEFFKEN ROBERT M, MOTSIFF WILLIAM T
• Format: Patent
• Language: English
• Published: 15.04.2008
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An adjustable self aligned low capacitance integrated circuit air gap structure comprises a first interconnect adjacent a second interconnect on an interconnect level, spacers formed along adjacent sides of the first and second interconnects, and an air gap formed between the first and second interc...