Process for treating fluorine compound-containing gas
A gas stream containing at least one fluorine compound selected from the group consisting of compounds of carbon and fluorine, compounds of carbon, hydrogen and fluorine, compounds of sulfur and fluorine, compounds of nitrogen and fluorine and compounds of carbon, hydrogen, oxygen and fluorine is co...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English |
Published |
25.03.2008
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Subjects | |
Online Access | Get full text |
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