Laser gas replenishment method

• Main Authors: VOGLER KLAUS WOLFGANG, KLEINSCHMIDT JUERGEN, GOVORKOV SERGEI, ZSCHOCKE WOLFGANG, ALBRECHT HANS-STEPHAN, SCHROEDER THOMAS, STAMM UWE, BERGER VADIM, BRAGIN IGOR
• Format: Patent
• Language: English
• Published: 04.09.2007
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; DEVICES USING STIMULATED EMISSION; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fl...