Valve with an integral orifice
A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the p...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
19.12.2006
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Subjects | |
Online Access | Get full text |
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