Apparatus for planarizing a probe card and method using same

An apparatus for use with a wafer prober and a probe card comprising a stiffening member having a feature defining a first plane. The stiffening member is mountable atop the central portion of the probe card. A reference member is provided to mount to the wafer prober and has an underside with a fea...

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Bibliographic Details
Main Authors WAKEFIELD RAY, FOSTER CRAIG Z
Format Patent
LanguageEnglish
Published 29.08.2006
Subjects
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