Apparatus for planarizing a probe card and method using same

An apparatus for use with a wafer prober and a probe card comprising a stiffening member having a feature defining a first plane. The stiffening member is mountable atop the central portion of the probe card. A reference member is provided to mount to the wafer prober and has an underside with a fea...

Full description

Saved in:
Bibliographic Details
Main Authors WAKEFIELD RAY, FOSTER CRAIG Z
Format Patent
LanguageEnglish
Published 29.08.2006
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:An apparatus for use with a wafer prober and a probe card comprising a stiffening member having a feature defining a first plane. The stiffening member is mountable atop the central portion of the probe card. A reference member is provided to mount to the wafer prober and has an underside with a feature defining a second plane. When the feature of the stiffening member defining the first plane is urged against the feature of the reference member defining a second plane the probe tips of the probe card are substantially planarized relative to the wafer prober.
Bibliography:Application Number: US20040902188