Method of manufacturing a fixed abrasive material

Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth...

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Bibliographic Details
Main Authors ALDRICH DALE J, ERDEM BEDRI, BALIJEPALLI SUDHAKAR, GRIER LAURA A, MEYERS GREGORY F
Format Patent
LanguageEnglish
Published 27.06.2006
Subjects
GRINDING
PERFORMING OPERATIONS
POLISHING
TOOLS FOR GRINDING, BUFFING, OR SHARPENING
TRANSPORTING
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Summary:Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material having an open cell structure containing between about 5 and 85 wt % abrasive particles and a dry density of about 350 kg/m3 to 1200 kg/m3.
Bibliography:Application Number: US20030369628