Piezoelectric thin-film element and a manufacturing method thereof

To provide a piezoelectric thin-film element small in leak current between electrode metal films and its manufacturing method are presented, the piezoelectric thin-film element includes at least one unit laminated body composed of a piezoelectric thin-film having a mutually facing first surface and...

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Bibliographic Details
Main Authors UCHIYAMA HIROKAZU, KITA HIROYUKI
Format Patent
LanguageEnglish
Published 09.05.2006
Subjects
ELECTRICITY
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Summary:To provide a piezoelectric thin-film element small in leak current between electrode metal films and its manufacturing method are presented, the piezoelectric thin-film element includes at least one unit laminated body composed of a piezoelectric thin-film having a mutually facing first surface and second surface, a first electrode metal film on the first surface, and a second electrode metal film on the second surface, in which an electrode separation surface composed of a piezoelectric thin-film surface parallel to the first surface is provided between the first electrode metal film and second electrode metal film.
Bibliography:Application Number: US20040014988