Scanning electron microscope

A scanning electron microscope in the present invention includes an electron source 1 to radiate an electron beam, an objective lens system 9 to focus the radiated electron beam on a sample 10 , scanning systems 5, 8 to scan the focused electron beam on the sample, secondary electron detection syste...

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Bibliographic Details
Main Authors KIMURA KOUJI, KOIKE HIROTAMI
Format Patent
LanguageEnglish
Published 17.05.2005
Edition7
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
SEMICONDUCTOR DEVICES
TESTING
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Summary:A scanning electron microscope in the present invention includes an electron source 1 to radiate an electron beam, an objective lens system 9 to focus the radiated electron beam on a sample 10 , scanning systems 5, 8 to scan the focused electron beam on the sample, secondary electron detection systems 3,4 to detect secondary electrons emitted from the sample 10 , and a secondary electron image displaying system 13 to display a secondary electron image of the sample 10 with a secondary electron detection signal from the secondary electron detection system. The objective lens 9 is composed of first and second objective lenses 11, 12 . The first objective lens 11 is mainly excited when using in a wide visual field mode and the second objective lens 12 is mainly excited when using in a high resolution mode.
Bibliography:Application Number: US20030615531