Method of fabricating micro-electromechanical switches on CMOS compatible substrates

• Main Authors: GROVES ROBERT A, STEIN KENNETH J, VOLANT RICHARD P, PETRARCA KEVIN S, COTE DONNA R, SUBBANNA SESHADRI, BISSON JOHN C, DALTON TIMOTHY J
• Format: Patent
• Language: English
• Published: 28.09.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SWITCHES; ELECTRICITY; EMERGENCY PROTECTIVE DEVICES; RELAYS; SELECTORS

A method of fabricating micro-electromechanical switches (MEMS) integrated with conventional semiconductor interconnect levels, using compatible processes and materials is described. The method is based upon fabricating a capacitive switch that is easily modified to produce various configurations fo...