Chip capacitance measurement circuit

• Main Authors: FAN CHEN-TENG, WANG JYH-HERNG
• Format: Patent
• Language: English
• Published: 11.06.2002
• Edition: 7
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

A silicon chip capacitance measurement circuit including three pairs of completely matched MOS transistors divided into two symmetrical circuits. Capacitance of a capacitor within the silicon chip is measured using the difference in average charging current flowing from the measurement circuit via a...