Method of fabricating semiconductor laser diode

• Main Authors: TAKEMASA KEIZO, WADA HIROSHI, KATOH YUKIO
• Format: Patent
• Language: English
• Published: 14.05.2002
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY

A mask layer is formed on a semiconductor substrate such that an elongate opening of the mask layer extends lengthwise at an angle relative to a [011] direction of the semiconductor substrate. A ridge waveguide structure including an active layer is formed within the elongate opening on the semicond...