Low actuation voltage microelectromechanical device and method of manufacture

• Main Authors: SHEN; SHYHIANG, FENG; MILTON
• Format: Patent
• Language: English
• Published: 07.11.2000
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SWITCHES; ELECTRICITY; EMERGENCY PROTECTIVE DEVICES; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; RELAYS; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE; SELECTORS; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; WAVEGUIDES

A method and apparatus for controlling the flow of signals by selectively switching signals to ground and allowing signals to pass through a signal line based a position of a conductive pad. The switch contains waveguides including the signal line and at least one ground plane. The conductive pad re...