APA (7th ed.) Citation

M, M. A. (1997). Silicon on insulator achieved using electrochemical etching (6.).

Chicago Style (17th ed.) Citation

M, MCCARTHY; ANTHONY. Silicon on Insulator Achieved Using Electrochemical Etching. 6. 1997.

MLA (9th ed.) Citation

M, MCCARTHY; ANTHONY. Silicon on Insulator Achieved Using Electrochemical Etching. 6. 1997.

Warning: These citations may not always be 100% accurate.