Large area X-ray imager and method of fabrication

• Main Authors: JEROMIN; LOTHAR S, ROBINSON, JR.; GEORGE D
• Format: Patent
• Language: English
• Published: 10.01.1995
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASUREMENT OF NUCLEAR OR X-RADIATION; MEASURING; PHYSICS; PICTORIAL COMMUNICATION, e.g. TELEVISION; SEMICONDUCTOR DEVICES; TESTING

A large area X-ray image capture element is fabricated by juxtaposing a plurality of discrete array modules in an assembly over the top surface of a base plate, such that each module is disposed adjacent at least one other module to form a two-dimensional mosaic of modules. Each of the discrete modules includes a plurality of thin-form transistors arrayed adjacent the top surface of a dielectric substrate wherein at least one precision-ground edge forms a precise abutment with a precision-ground edge of another substrate. A continuous radiation detecting layer is disposed over the plurality of juxtaposed modules, and produces a latent radiographic image in the form of electrical charges. Such a method minimizes or totally voids the non-radiation-detecting areas created at the borders between the array modules.