METHOD OF FABRICATION METAL-ELECTRODE IN SEMICONDUCTOR DEVICE

• Main Authors: KIM; SANGSOO, KIM; HYUNGTAEK, SOHN; JEONGHA, BAE; BYUNGSEONG, KIM; NAMDEOG, JANG; INSIK
• Format: Patent
• Language: English
• Published: 31.08.1993
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method of fabricating a metal electrode of a semiconductor device that includes a substrate with unanodized and anodized metal layers thereon includes the steps of forming a first metal layer, which is anodizable, to a first predetermined thickness on a substrate; forming and patterning a second m...