Latch-up resistant CMOS process

A latch-up free CMOS structure and method of fabrication thereof is disclosed. A P-type substrate (40) is appropriately masked to form a plurality of sites in which isolated wells (50) are formed. A thermal oxide layer (56) is grown on the surface of each well (50), and a boron channel stop (62) imp...

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Bibliographic Details
Main Author TENG; CLARENCE W
Format Patent
LanguageEnglish
Published 17.09.1991
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Abstract A latch-up free CMOS structure and method of fabrication thereof is disclosed. A P-type substrate (40) is appropriately masked to form a plurality of sites in which isolated wells (50) are formed. A thermal oxide layer (56) is grown on the surface of each well (50), and a boron channel stop (62) implanted therearound. Polysilicon semiconductor material (68) is formed within each well, and implant doped to form an N-well (76) of material. The P-substrate (40) is planarized. PMOS transistors are formed within the oxide isolate N-wells (76), while NMOS transistors are formed in the P-substrate (40) outside the wells.
AbstractList A latch-up free CMOS structure and method of fabrication thereof is disclosed. A P-type substrate (40) is appropriately masked to form a plurality of sites in which isolated wells (50) are formed. A thermal oxide layer (56) is grown on the surface of each well (50), and a boron channel stop (62) implanted therearound. Polysilicon semiconductor material (68) is formed within each well, and implant doped to form an N-well (76) of material. The P-substrate (40) is planarized. PMOS transistors are formed within the oxide isolate N-wells (76), while NMOS transistors are formed in the P-substrate (40) outside the wells.
Author TENG; CLARENCE W
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Snippet A latch-up free CMOS structure and method of fabrication thereof is disclosed. A P-type substrate (40) is appropriately masked to form a plurality of sites in...
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ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title Latch-up resistant CMOS process
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