Method for the manufacture of thin-film capacitors
Thin-film capacitors are produced with laser chemical vapor deposition technology on a substrate, which is preferably the substrate of an integrated circuit, by forming alternating layers of electrodes and dielectric.
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Main Author | |
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Format | Patent |
Language | English |
Published |
21.03.1989
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Edition | 4 |
Subjects | |
Online Access | Get full text |
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