Image sensor array for assembly with like arrays to form a longer array

• Main Authors: ARAGHI; MEHDI N, TANDON; JAGDISH C
• Format: Patent
• Language: English
• Published: 22.09.1987
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Apparatus and method of fabricating a sensor array from a (110) silicon substrate having a row of photosites to provides a sensor array chip with uniformly smooth and angled ends designed to permit the chip to be lock butted end to end with other like chips to form a full length scanning array in wh...