Vapor-phase axial deposition torch
A reactant deposition torch (10) has a plurality of concentric glass tubes (16, 18, 20, 24 and 26). Various gases pass through the tubes (18, 20, 24 and 26) while particle producing reactants pass through the inner tube (16). The concentricity of the tubes is accurately maintained by a plurality of...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
29.11.1983
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Subjects | |
Online Access | Get full text |
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Summary: | A reactant deposition torch (10) has a plurality of concentric glass tubes (16, 18, 20, 24 and 26). Various gases pass through the tubes (18, 20, 24 and 26) while particle producing reactants pass through the inner tube (16). The concentricity of the tubes is accurately maintained by a plurality of precision machined splines located on the outer periphery of the inner and intermediate tubes (16, 18, 20 and 24). Additionally, the inner tube (16) is movable in the axial direction during the deposition process to controllably alter the amount of reactant to be deposited. |
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Bibliography: | Application Number: US19820371628 |