IMMERSION DIFFRACTION ELEMENT AND METHOD FOR PRODUCING SAME

• Main Author: TOMITA, Mitsuru
• Format: Patent
• Language: English
• Published: 24.10.2024
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Provided is an immersion diffraction element easily producible and capable of increasing the degrees of freedom in the design of a diffraction portion. An immersion diffraction element 1 includes a prism portion 2 and a diffraction portion 4, wherein the prism portion 2 and the diffraction portion 4...