SUBSTRATE PROCESSING APPARATUS

• Main Authors: JEONG, Min Ju, PARK, Sang Yeol, LEE, Kyung Min, CHO, Yong Won, LIM, Eun Suk, KIM, Sung-Yeol, YOO, Myung Jae, LIM, Sung Yong
• Format: Patent
• Language: English
• Published: 19.09.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

A substrate processing apparatus including the controller are provided. The controller includes: a signal analyzer configured to detect at least one of an amplitude, phase, and frequency of a first signal, which is provided to a chamber; a radio frequency (RF) signal generator configured to generate...