COMPREHENSIVE ANALYSIS MODULE FOR DETERMINING PROCESSING EQUIPMENT PERFORMANCE

A method includes receiving, by a processing device, first data indicative of a processing recipe. The method further includes receiving second data. The second data includes operational data associated with the processing recipe. The method further includes receiving third data. The third data incl...

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Main Authors Cantwell, Dermot Patrick, Han, Hui-Ling, Oh, Moon Kyu, Li, Weili
Format Patent
LanguageEnglish
Published 19.09.2024
Subjects
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
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Abstract A method includes receiving, by a processing device, first data indicative of a processing recipe. The method further includes receiving second data. The second data includes operational data associated with the processing recipe. The method further includes receiving third data. The third data includes historical data associated with the processing recipe. The method further includes performing analysis indicative of performance of a processing chamber based on the first, second, and third data. The method further includes causing performance of a corrective action in view of the analysis.
AbstractList A method includes receiving, by a processing device, first data indicative of a processing recipe. The method further includes receiving second data. The second data includes operational data associated with the processing recipe. The method further includes receiving third data. The third data includes historical data associated with the processing recipe. The method further includes performing analysis indicative of performance of a processing chamber based on the first, second, and third data. The method further includes causing performance of a corrective action in view of the analysis.
Author Cantwell, Dermot Patrick
Han, Hui-Ling
Li, Weili
Oh, Moon Kyu
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Snippet A method includes receiving, by a processing device, first data indicative of a processing recipe. The method further includes receiving second data. The...
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SubjectTerms CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
Title COMPREHENSIVE ANALYSIS MODULE FOR DETERMINING PROCESSING EQUIPMENT PERFORMANCE
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