SEMICONDUCTOR STRUCTURE FORMING A PLURALITY OF TRANSISTORS

• Main Authors: Andric, Stefan, Olson, Simon, Wernersson, Lars-Erik, Tilly, Lars, Tired, Tobias, Jönsson, Adam
• Format: Patent
• Language: English
• Published: 04.07.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor structure forming a plurality of transistors is disclosed. The semiconductor structure comprising: a source layer; a plurality of vertical nanowires erecting from the source layer; a first spacer layer arranged on the source layer and around each of the plurality of vertical nanowire...