RUNOUT AND WOBBLE MEASUREMENT FIXTURES
A fixture is provided. The fixture includes a base, a turntable, a first sensor, and a second sensor. The turntable is supported on the base, is rotatable about a rotation axis, and is configured to slidably seat a susceptor assembly for rotation about the rotation axis. The first sensor is fixed re...
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | English |
Published |
04.07.2024
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!