CONTROL UNIT AND SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING THE SAME

There are provided a control unit and semiconductor manufacturing equipment including the same, which control a damper installed in a main exhaust duct based on exhaust volumes measured from individual exhaust ducts connected to respective units. The semiconductor manufacturing equipment includes: a...

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Bibliographic Details
Main Authors PARK, Dongwoon, YOO, Jae Ho, OH, Doo Young, MUN, Hyeong Og
Format Patent
LanguageEnglish
Published 20.06.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:There are provided a control unit and semiconductor manufacturing equipment including the same, which control a damper installed in a main exhaust duct based on exhaust volumes measured from individual exhaust ducts connected to respective units. The semiconductor manufacturing equipment includes: a damper installed in a main exhaust pipe; a first unit treating a substrate and connected to the main exhaust pipe through a first auxiliary exhaust pipe; a second unit treating the substrate and connected to the main exhaust pipe through a second auxiliary exhaust pipe; and a control unit controlling the first and second units, wherein the control unit controls the damper based on exhaust volumes from the first and second units.
Bibliography:Application Number: US202318500963