VACUUM FEEDTHROUGH, ELECTRODE ASSEMBLY, AND DEVICE FOR GENERATING A SILENT PLASMA DISCHARGE

• Main Authors: WALDNER, Astrid, ANDREAUS, Bernhard
• Format: Patent
• Language: English
• Published: 13.06.2024
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; TESTING

A vacuum feedthrough (10) which is constructed in radial layers comprises the following elements (from inwards to outwards): -a lens element (11), -a first ring (12) made of glass, -a first hollow cylinder (13) made of a first dielectric material, -a first electrically conductive layer (18), -a second hollow cylinder (14) made of glass, -a third hollow cylinder (15) made of ceramic, -a second ring made of glass (16), and-a frame (17) made of metal. On the basis of the vacuum feedthrough, the invention additionally relates to an electrode assembly, to a device for generating a DBD plasma discharge, to a measuring device for characterizing a pressure and/or a gas composition, and to a method for operating the measuring device.