INTERCONNECT WIRES INCLUDING RELATIVELY LOW RESISTIVITY CORES
A dielectric layer and a method of forming thereof. An opening defined in a dielectric layer and a wire deposited within the opening, wherein the wire includes a core material surrounded by a jacket material, wherein the jacket material exhibits a first resistivity ρ1 and the core material exhibits...
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | English |
Published |
04.04.2024
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!