DETERMINATION OF RECIPES FOR MANUFACTURING SEMICONDUCTOR DEVICES

• Main Authors: Alden, Emily Ann, Sawlani, Kapil Umesh, Danek, Michal, Basu, Atashi, Fried, David Michael
• Format: Patent
• Language: English
• Published: 21.03.2024
• Subjects: CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; PHYSICS

Methods, systems, and computer programs are presented for determining the recipe for manufacturing a semiconductor with the use of machine learning (ML) to accelerate the definition of recipes. One general aspect includes a method that includes an operation for performing experiments for processing...