DEPTH-PROFILING OF SAMPLES BASED ON X-RAY MEASUREMENTS

• Main Authors: Hadar, Uri, Eilon, Michal, Girmonsky, Doron, Shemesh, Dror
• Format: Patent
• Language: English
• Published: 14.03.2024
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Disclosed herein is a system for non-destructive depth-profiling of samples. The system includes an electron beam source, a light sensor, and processing circuitry. The electron beam source configured to project e-beams on an inspected sample at each of a plurality of landing energies, which induce X...