DEPTH-PROFILING OF SAMPLES BASED ON X-RAY MEASUREMENTS
Disclosed herein is a system for non-destructive depth-profiling of samples. The system includes an electron beam source, a light sensor, and processing circuitry. The electron beam source configured to project e-beams on an inspected sample at each of a plurality of landing energies, which induce X...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
14.03.2024
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Subjects | |
Online Access | Get full text |
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