DYNAMIC HVPE OF COMPOSITIONALLY GRADED BUFFER LAYERS
Described herein are devices and methods related to compositionally graded buffers (CGB) and methods and/or systems for producing CGBs. CGBs enable the growth of high quality materials that are lattice mismatched to a substrate. More specifically, the present disclosure relates to methods for making...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
14.03.2024
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Subjects | |
Online Access | Get full text |
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