Miniature Pressure/Force Sensor With Integrated Leads
A pressure/force sensor comprises a diaphragm structure including a sensing element and a lead structure extending from the diaphragm structure and including first and second traces electrically coupled to the sensing element. The diaphragm structure and the lead structure include a circuit assembly...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
29.02.2024
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Subjects | |
Online Access | Get full text |
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